微间距气压对场致发射影响的分析与计算*

doi:10.11985/2023.01.028

电气工程学报 ›› 2023, Vol. 18 ›› Issue (1): 251-257.doi: 10.11985/2023.01.028

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微间距气压对场致发射影响的分析与计算^*

陈芸(), 孙岩洲(), 李彦森, 贾斌, 杨明

河南理工大学电气工程与自动化学院焦作 454000

收稿日期:2021-10-19 修回日期:2022-02-06 出版日期:2023-03-25 发布日期:2023-04-19
作者简介:陈芸，女，1997年生，硕士研究生。主要研究方向为高电压与绝缘。E-mail：1135496926@qq.com
孙岩洲，男，1972年生，博士，教授。主要研究方向为气体放电、高电压与供电技术。E-mail：sunyz@hpu.edu.cn
基金资助:
*国家自然科学基金资助项目(U1804143)

Analysis and Calculation of the Influence of Air Pressure on Field Emission at Micro-gap

CHEN Yun(), SUN Yanzhou(), LI Yansen, JIA Bin, YANG Ming

School of Electrical Engineering and Automation, Henan Polytechnic University, Jiaozuo 454000

Received:2021-10-19 Revised:2022-02-06 Online:2023-03-25 Published:2023-04-19

摘要/Abstract

摘要：

为研究微米间隙中气体的击穿特性，在3~100 μm间隙距离中进行1~100 kPa可变气压的放电试验。试验发现10 μm以下间距击穿电压曲线偏离巴申曲线，固定间距只改变压强时，击穿电压随气压的变化与较长间隙不同，3~5 μm间距的击穿电压会随气压升高而降低。通过求解阴极附近离子数密度公式，发现微间距条件下阴极附近有较高的离子数密度，离子数密度会随气压的升高而增加，随间距增大而减小。离子数密度越高，在阴极表面附近形成离子附加电场就越强，与外电场耦合后促进场致发射，击穿会更易发生。计算了离子增强场效应系数γ'，并将其与Townsend二次发射系数γ对比，发现离子增强场效应对5 μm以下的间隙放电影响最强烈，随间距的增加其影响逐渐减弱，10 μm后击穿过程可用Townsend理论来解释。

关键词: 微米尺度, 气体放电, 离子增强场效应, 场致发射, 巴申曲线

Abstract:

To study the breakdown characteristics of gases at micro-gaps, discharge experiments are carried out at variable air pressures from 1-100 kPa with a gap distance of 3-100 μm. It is found that the breakdown voltage curve deviates from the Paschen curve for spacing below 10 μm, and the breakdown voltage changes with air pressure when the fixed spacing only changes the pressure, which is different from the long gap, and the breakdown voltage decreases with increasing air pressure for 3-5 μm. By solving the equation for the ion number density near the cathode, it is found that there is a high ion number density near the cathode under the micro-gap condition, which increases with the increase of air pressure and decreases with the increase of electrode spacing. The higher the ion density, the stronger the ion additional electric field will be formed near the cathode surface, which will promote field emission after coupling with the applied electric field, and breakdown will occur more easily. The ion-enhanced field-effect coefficient γ' is calculated and compared with the Townsend secondary emission coefficient γ. It is found that the ion-enhanced field effect has the strongest influence on the gap discharge below 5 μm, and its influence gradually weakens with the increase of the spacing. The breakdown process after 10 μm can be explained by the Townsend theory.

Key words: Micro-gap, gas discharge, ion-enhanced field effect, field emission, Paschen curve

中图分类号:

TN136

陈芸, 孙岩洲, 李彦森, 贾斌, 杨明. 微间距气压对场致发射影响的分析与计算^*[J]. 电气工程学报, 2023, 18(1): 251-257.

CHEN Yun, SUN Yanzhou, LI Yansen, JIA Bin, YANG Ming. Analysis and Calculation of the Influence of Air Pressure on Field Emission at Micro-gap[J]. Journal of Electrical Engineering, 2023, 18(1): 251-257.

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气体压强/kPa	附加电场/(V/m)
0.1	2.24×10⁴
1	2.30×10⁵
10	2.11×10⁶
30	6.08×10⁶
50	0.99×10⁷
80	1.47×10⁷
100	1.79×10⁷

微间距气压对场致发射影响的分析与计算^*

Analysis and Calculation of the Influence of Air Pressure on Field Emission at Micro-gap

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